<\/span><\/h3>\n(1) \u00c1p su\u1ea5t \u00e2m ch\u00e2n kh\u00f4ng \u0111\u1ee7. Khi v\u00f2i h\u00fat h\u00fat th\u00e0nh ph\u1ea7n, m\u1ed9t \u00e1p su\u1ea5t \u00e2m nh\u1ea5t \u0111\u1ecbnh \u0111\u01b0\u1ee3c t\u1ea1o ra t\u1ea1i v\u00f2i h\u00fat v\u00e0 th\u00e0nh ph\u1ea7n b\u1ecb h\u1ea5p ph\u1ee5 tr\u00ean v\u00f2i h\u00fat. Ph\u01b0\u01a1ng ph\u00e1p ph\u00e1t hi\u1ec7n \u00e1p su\u1ea5t \u00e2m th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 x\u00e1c \u0111\u1ecbnh Khi gi\u00e1 tr\u1ecb ph\u00e1t hi\u1ec7n c\u1ee7a c\u1ea3m bi\u1ebfn n\u1eb1m trong m\u1ed9t ph\u1ea1m vi nh\u1ea5t \u0111\u1ecbnh, m\u00e1y cho r\u1eb1ng l\u1ef1c h\u00fat b\u00ecnh th\u01b0\u1eddng, ng\u01b0\u1ee3c l\u1ea1i th\u00ec coi nh\u01b0 m\u00e1y h\u00fat k\u00e9m.<\/span><\/p>\n(2) V\u00f2i h\u00fat b\u1ecb m\u00f2n, v\u00e0 s\u1ef1 bi\u1ebfn d\u1ea1ng, t\u1eafc ngh\u1ebdn v\u00e0 h\u01b0 h\u1ecfng c\u1ee7a v\u00f2i h\u00fat g\u00e2y ra kh\u00f4ng \u0111\u1ee7 \u00e1p su\u1ea5t kh\u00ed d\u1eabn \u0111\u1ebfn kh\u00f4ng th\u1ec3 h\u00fat c\u00e1c b\u1ed9 ph\u1eadn. Do \u0111\u00f3, c\u1ea7n ki\u1ec3m tra \u0111\u1ed9 m\u00f2n c\u1ee7a v\u00f2i h\u00fat th\u01b0\u1eddng xuy\u00ean, v\u00e0 nh\u1eefng c\u00e1i nghi\u00eam tr\u1ecdng c\u1ea7n \u0111\u01b0\u1ee3c thay th\u1ebf.<\/span><\/p>\n(3) \u1ea2nh h\u01b0\u1edfng c\u1ee7a b\u1ed9 c\u1ea5p li\u1ec7u, \u0103n c\u1ee7a b\u1ed9 c\u1ea5p li\u1ec7u k\u00e9m (b\u00e1nh r\u0103ng c\u1ee7a b\u1ed9 c\u1ea5p li\u1ec7u b\u1ecb h\u1ecfng), l\u1ed7 \u0111ai nguy\u00ean li\u1ec7u kh\u00f4ng b\u1ecb k\u1eb9t tr\u00ean b\u00e1nh r\u0103ng c\u1ee7a b\u1ed9 c\u1ea5p li\u1ec7u, c\u00f3 v\u1eadt l\u1ea1 d\u01b0\u1edbi b\u1ed9 ph\u1eadn n\u1ea1p li\u1ec7u, v\u00f2ng tr\u00f2n b\u1ecb m\u00f2n), d\u00e2y curoa b\u1ecb \u00e9p T\u1ea5m n\u1eafp, l\u00f2 xo v\u00e0 c\u00e1c c\u01a1 c\u1ea5u v\u1eadn h\u00e0nh kh\u00e1c b\u1ecb bi\u1ebfn d\u1ea1ng, r\u1ec9 s\u00e9t s\u1ebd l\u00e0m cho linh ki\u1ec7n b\u1ecb l\u1ec7ch, m\u1ea3nh d\u1ecdc ho\u1eb7c thi\u1ebft b\u1ecb kh\u00f4ng th\u1ec3 h\u00fat \u0111\u01b0\u1ee3c thi\u1ebft b\u1ecb. \u0111\u01b0\u1ee3c ki\u1ec3m tra th\u01b0\u1eddng xuy\u00ean v\u00e0 x\u1eed l\u00fd s\u1ef1 c\u1ed1 k\u1ecbp th\u1eddi \u0111\u1ec3 tr\u00e1nh l\u00e3ng ph\u00ed l\u1edbn thi\u1ebft b\u1ecb.<\/span><\/p>\n(4) \u1ea2nh h\u01b0\u1edfng c\u1ee7a chi\u1ec1u cao h\u00fat, chi\u1ec1u cao h\u00fat l\u00fd t\u01b0\u1edfng l\u00e0 \u1ea5n xu\u1ed1ng 0,05mm khi \u0111\u1ea7u h\u00fat c\u1ee7a m\u00e1y \u0111\u1eb7t ch\u1ea1m v\u00e0o b\u1ec1 m\u1eb7t c\u1ee7a linh ki\u1ec7n, n\u1ebfu chi\u1ec1u s\u00e2u \u00e9p qu\u00e1 l\u1edbn, linh ki\u1ec7n s\u1ebd b\u1ecb \u00e9p v\u00e0o thay v\u00e0o \u0111\u00f3 l\u00e0 m\u00e1ng. Kh\u00f4ng th\u1ec3 l\u1ea5y v\u1eadt li\u1ec7u. N\u1ebfu l\u1ef1c h\u00fat c\u1ee7a m\u1ed9t b\u1ed9 ph\u1eadn n\u00e0o \u0111\u00f3 kh\u00f4ng t\u1ed1t, c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh chi\u1ec1u cao h\u00fat l\u00ean m\u1ed9t ch\u00fat, ch\u1eb3ng h\u1ea1n nh\u01b0 0,05mm.<\/span><\/p>\n(5) V\u1ea5n \u0111\u1ec1 v\u1ec1 nguy\u00ean li\u1ec7u \u0111\u1ea7u v\u00e0o. C\u00f3 v\u1ea5n \u0111\u1ec1 v\u1ec1 ch\u1ea5t l\u01b0\u1ee3ng trong vi\u1ec7c \u0111\u00f3ng g\u00f3i c\u00e1c th\u00e0nh ph\u1ea7n chip do m\u1ed9t s\u1ed1 nh\u00e0 s\u1ea3n xu\u1ea5t s\u1ea3n xu\u1ea5t, ch\u1eb3ng h\u1ea1n nh\u01b0 l\u1ed7i l\u1edbn v\u1ec1 kho\u1ea3ng c\u00e1ch gi\u1eefa c\u00e1c l\u1ed7, \u0111\u1ed9 b\u00e1m d\u00ednh qu\u00e1 m\u1ee9c gi\u1eefa b\u0103ng gi\u1ea5y v\u00e0 m\u00e0ng nh\u1ef1a, v\u00e0 k\u00edch th\u01b0\u1edbc nh\u1ecf c\u1ee7a m\u00e1ng. C\u00e1c l\u00fd do c\u00f3 th\u1ec3 x\u1ea3y ra cho vi\u1ec7c kh\u00f4ng nh\u1eb7t.<\/span><\/p>\n